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    New excimer ultraviolet sources for photo-assisted deposition of thin films: an alternative to excimer-laser-induced deposition (Invited Paper) [2403-23]

    New search for: Boyd, I. W.
    New search for: Zhang, J.-Y.
    New search for: Bergonzo, P.
    New search for: Dobowski, J. J.
    New search for: SPIE

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    New excimer ultraviolet sources for photo-assisted deposition of thin films: an alternative to excimer-laser-induced deposition (Invited Paper) [2403-23]

    New search for: Boyd, I. W.
    New search for: Zhang, J.-Y.
    New search for: Bergonzo, P.
    New search for: Dobowski, J. J.
    New search for: SPIE

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    New excimer ultraviolet sources for photo-assisted deposition of thin films: an alternative to excimer-laser-induced deposition (Invited Paper) [2403-23]

    New search for: Boyd, I. W.
    New search for: Zhang, J.-Y.
    New search for: Bergonzo, P.
    New search for: Dobowski, J. J.
    New search for: SPIE

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    New excimer ultraviolet sources for photo-assisted deposition of thin films: an alternative to excimer-laser-induced deposition (Invited Paper) [2403-23]

    Contributors:

    Boyd, I. W. (author) / Zhang, J.-Y. (author) / Bergonzo, P. (author) / Dobowski, J. J. / SPIE

    Conference:

    Conference, Laser-induced thin film processing ; 1995 ; San Jose; CA

    Published in:

    Laser-induced thin film processing ; 290-301

    PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

    Publication date:

    1995-01-01

    Size:

    12 pages

    ISBN:

    0819417505

    ISSN:

    0361-0748

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    laser induced thin film processing , SPIE

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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