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    Organic Compounds in Cleanroom Ambient Air for Contamination Control of Si Wafer Surface

    New search for: Kagi, N.
    New search for: Fujii, S.
    New search for: Yuasa, K.
    New search for: Yabumoto, N.
    New search for: Woods, J. E.
    New search for: Grimsrud, D. T.
    New search for: Boschi, N.

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    Organic Compounds in Cleanroom Ambient Air for Contamination Control of Si Wafer Surface

    New search for: Kagi, N.
    New search for: Fujii, S.
    New search for: Yuasa, K.
    New search for: Yabumoto, N.
    New search for: Woods, J. E.
    New search for: Grimsrud, D. T.
    New search for: Boschi, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Organic Compounds in Cleanroom Ambient Air for Contamination Control of Si Wafer Surface

    New search for: Kagi, N.
    New search for: Fujii, S.
    New search for: Yuasa, K.
    New search for: Yabumoto, N.
    New search for: Woods, J. E.
    New search for: Grimsrud, D. T.
    New search for: Boschi, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Organic Compounds in Cleanroom Ambient Air for Contamination Control of Si Wafer Surface

    Contributors:

    Kagi, N. (author) / Fujii, S. (author) / Yuasa, K. (author) / Yabumoto, N. (author) / Woods, J. E. / Grimsrud, D. T. / Boschi, N.

    Conference:

    Conference, Healthy buildings/IAQ '97: global issues and regional solutions ; 1997 ; Bethesda; MD

    Published in:

    Healthy buildings/IAQ '97: global issues and regional solutions ; 527-532

    HEALTHY BUILDINGS -INTERNATIONAL CONFERENCE- ; 3

    Publication date:

    1997-01-01

    Size:

    6 pages

    ISBN:

    0929900251

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    healthy buildings , IAQ , indoor air quality , health care facilities , public assembly buildings

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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