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Adsorption mechanisms of organic compounds on si wafer surfaces in cleanroom air

Kagi, N. / Fujii, S. / Yuasa, K.

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Adsorption mechanisms of organic compounds on si wafer surfaces in cleanroom air

Kagi, N. / Fujii, S. / Yuasa, K.

Adsorption mechanisms of organic compounds on si wafer surfaces in cleanroom air

Kagi, N. / Fujii, S. / Yuasa, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Adsorption mechanisms of organic compounds on si wafer surfaces in cleanroom air

Contributors:

Kagi, N. (author) / Fujii, S. (author) / Yuasa, K. (author)

Published in:

JOURNAL OF ARCHITECTURE PLANNING AND ENVIRONMENTAL ENGINEERING ; 47-52

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0910-8017

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 720

Kagi, N. / Fujii, S. / Yuasa, K. et al. | British Library Online Contents | 1999

Theoretical study on adsorption mechanisms of gaseous matter from cleanroom air onto silicon wafer surface

Kagi, N. / Fujii, S. | British Library Online Contents | 2000

Organic Compounds in Cleanroom Ambient Air for Contamination Control of Si Wafer Surface

Kagi, N. / Fujii, S. / Yuasa, K. et al. | British Library Conference Proceedings | 1997

Estimates of amount of organic compounds emitted from cleanroom materials and concentration in cleanroom air

Tamura, H. / Fujii, S. / Kagi, N. et al. | British Library Online Contents | 2001

Fire hazards of wafer carriers in cleanroom environment

Wu, P.K.S. / Chaffee, J.L. / Peterkin, H. | Tema Archive | 2003