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    Role of moisture for absorption mechanisms of organic compounds on si wafer surfaces: Gaseous organic compounds in cleanroom air

    New search for: Kagi, N.
    New search for: Fujii, S.
    New search for: Yuasa, K.
    New search for: Tanaka, K.

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    Role of moisture for absorption mechanisms of organic compounds on si wafer surfaces: Gaseous organic compounds in cleanroom air

    New search for: Kagi, N.
    New search for: Fujii, S.
    New search for: Yuasa, K.
    New search for: Tanaka, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Role of moisture for absorption mechanisms of organic compounds on si wafer surfaces: Gaseous organic compounds in cleanroom air

    New search for: Kagi, N.
    New search for: Fujii, S.
    New search for: Yuasa, K.
    New search for: Tanaka, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Role of moisture for absorption mechanisms of organic compounds on si wafer surfaces: Gaseous organic compounds in cleanroom air

    Contributors:

    Kagi, N. (author) / Fujii, S. (author) / Yuasa, K. (author) / Tanaka, K. (author)

    Published in:

    JOURNAL OF ARCHITECTURE PLANNING AND ENVIRONMENTAL ENGINEERING ; 53-58

    Publication date:

    1999-01-01

    Size:

    6 pages

    ISSN:

    0910-8017

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  720

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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