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Facility for the curvature-based measurement of the nanotopography of complex surfaces [4098-13]

Thomsen-Schmidt, P. / Schulz, M. / Weingartner, I. / SPIE - International Society for Optical Engineering

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Facility for the curvature-based measurement of the nanotopography of complex surfaces [4098-13]

Thomsen-Schmidt, P. / Schulz, M. / Weingartner, I. / SPIE - International Society for Optical Engineering

Facility for the curvature-based measurement of the nanotopography of complex surfaces [4098-13]

Thomsen-Schmidt, P. / Schulz, M. / Weingartner, I. / SPIE - International Society for Optical Engineering

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Document information

Title:

Facility for the curvature-based measurement of the nanotopography of complex surfaces [4098-13]

Contributors:

Thomsen-Schmidt, P. (author) / Schulz, M. (author) / Weingartner, I. (author) / Andrews, D. L. / SPIE - International Society for Optical Engineering

Conference:

Conference, Optical devices and diagnostics in materials science ; 2000 ; San Diego, CA

Published in:

Optical devices and diagnostics in materials science ; 94-101

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 4098

Publication date:

2000-01-01

Size:

8 pages

ISBN:

0819437433

ISSN:

0277-786X

Type of media:

Conference paper

Type of material:

Language:

English

Keywords:

optical devices , SPIE , materials science , optical engineering

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