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Fabrication by wet etching of multilayer GaAlAs/GaAs microtips for SNOM applications [4098-22]

Gorecki, C. / Khalfallah, S. / Kawakatsu, H. / Arakawa, Y. / SPIE - International Society for Optical Engineering

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Fabrication by wet etching of multilayer GaAlAs/GaAs microtips for SNOM applications [4098-22]

Gorecki, C. / Khalfallah, S. / Kawakatsu, H. / Arakawa, Y. / SPIE - International Society for Optical Engineering

Fabrication by wet etching of multilayer GaAlAs/GaAs microtips for SNOM applications [4098-22]

Gorecki, C. / Khalfallah, S. / Kawakatsu, H. / Arakawa, Y. / SPIE - International Society for Optical Engineering

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Document information

Title:

Fabrication by wet etching of multilayer GaAlAs/GaAs microtips for SNOM applications [4098-22]

Contributors:

Gorecki, C. (author) / Khalfallah, S. (author) / Kawakatsu, H. (author) / Arakawa, Y. (author) / Andrews, D. L. / SPIE - International Society for Optical Engineering

Conference:

Conference, Optical devices and diagnostics in materials science ; 2000 ; San Diego, CA

Published in:

Optical devices and diagnostics in materials science ; 138-141

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 4098

Publication date:

2000-01-01

Size:

4 pages

ISBN:

0819437433

ISSN:

0277-786X

Type of media:

Conference paper

Type of material:

Language:

English

Keywords:

optical devices , SPIE , materials science , optical engineering

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