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Design and Simulation of High Efficient MEMS Electrothermal Actuator

Song, R.C. / Wang, G.L. / Wang, J.B. / Shen, Y.Y. / Lv, C.

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Design and Simulation of High Efficient MEMS Electrothermal Actuator

Song, R.C. / Wang, G.L. / Wang, J.B. / Shen, Y.Y. / Lv, C.

Design and Simulation of High Efficient MEMS Electrothermal Actuator

Song, R.C. / Wang, G.L. / Wang, J.B. / Shen, Y.Y. / Lv, C.

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Order at Subito €

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Document information

Title:

Design and Simulation of High Efficient MEMS Electrothermal Actuator

Contributors:

Song, R.C. (author) / Wang, G.L. (author) / Wang, J.B. (author) / Shen, Y.Y. (author) / Lv, C. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 504-508

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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