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Fabrication of diamond films by a magneto-active plasma CVD using alcohol-hydrogen system

Yara, T. / Yuasa, M. / Ma, J. S. / Suzuki, J.

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Fabrication of diamond films by a magneto-active plasma CVD using alcohol-hydrogen system

Yara, T. / Yuasa, M. / Ma, J. S. / Suzuki, J.

Fabrication of diamond films by a magneto-active plasma CVD using alcohol-hydrogen system

Yara, T. / Yuasa, M. / Ma, J. S. / Suzuki, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of diamond films by a magneto-active plasma CVD using alcohol-hydrogen system

Contributors:

Yara, T. (author) / Yuasa, M. (author) / Ma, J. S. (author) / Suzuki, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 60 ; 308

Publication date:

1992-01-01

Size:

308 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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