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Low Pressure and Low Temperature Synthesis of Diamond Films Using Magneto-Microwave Plasma CVD

Wei, J. / Kawarada, H. / Hiraki, A.

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Low Pressure and Low Temperature Synthesis of Diamond Films Using Magneto-Microwave Plasma CVD

Wei, J. / Kawarada, H. / Hiraki, A.

Low Pressure and Low Temperature Synthesis of Diamond Films Using Magneto-Microwave Plasma CVD

Wei, J. / Kawarada, H. / Hiraki, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Low Pressure and Low Temperature Synthesis of Diamond Films Using Magneto-Microwave Plasma CVD

Contributors:

Wei, J. (author) / Kawarada, H. (author) / Hiraki, A. (author)

Published in:

MATERIALS SCIENCE FORUM ; 465

Publication date:

1993-01-01

Size:

465 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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