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Deposition of Thin Films of Zirconium and Hafnium Boride by Plasma Enhanced Chemical Vapor Deposition
Deposition of Thin Films of Zirconium and Hafnium Boride by Plasma Enhanced Chemical Vapor Deposition
Deposition of Thin Films of Zirconium and Hafnium Boride by Plasma Enhanced Chemical Vapor Deposition
Reich, S. (author) / Suhr, H. (author) / Hanko, K. (author) / Szepes, L. (author)
1992-01-01
650 pages
Article (Journal)
Unknown
DDC:
620.11
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