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Spectroscopic ellipsometric measurements of plasma-enhanced chemical vapour deposition-grown SiN~xInP structure

Han, I. K. / Lee, Y. J. / Lee, J. I. / Kang, K. N.

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Spectroscopic ellipsometric measurements of plasma-enhanced chemical vapour deposition-grown SiN~xInP structure

Han, I. K. / Lee, Y. J. / Lee, J. I. / Kang, K. N.

Spectroscopic ellipsometric measurements of plasma-enhanced chemical vapour deposition-grown SiN~xInP structure

Han, I. K. / Lee, Y. J. / Lee, J. I. / Kang, K. N.

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Check availability in my library

Order at Subito €

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Document information

Title:

Spectroscopic ellipsometric measurements of plasma-enhanced chemical vapour deposition-grown SiN~xInP structure

Contributors:

Han, I. K. (author) / Lee, Y. J. (author) / Lee, J. I. (author) / Kang, K. N. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 11 ; 1689

Publication date:

1992-01-01

Size:

1689 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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