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AIN thin films by plasma-enhanced chemical vapour deposition

Lee, C. H. / Wu, C. T. / Pueng, C. Y.

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AIN thin films by plasma-enhanced chemical vapour deposition

Lee, C. H. / Wu, C. T. / Pueng, C. Y.

AIN thin films by plasma-enhanced chemical vapour deposition

Lee, C. H. / Wu, C. T. / Pueng, C. Y.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

AIN thin films by plasma-enhanced chemical vapour deposition

Contributors:

Lee, C. H. (author) / Wu, C. T. (author) / Pueng, C. Y. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 15 ; 229

Publication date:

1992-01-01

Size:

229 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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