Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp

Miyajima, S. / Milne, W. I. / Yoon, S. F. et al. | British Library Online Contents | 1995

ArF-excimer laser induced chemical vapour deposition of amorphous hydrogenated SiGeC films

Lopez, E. / Chiussi, S. / Serra, C. et al. | British Library Online Contents | 2003

Plasmochemical deposition of amorphous hydrogenated silicon films

Bosyakov, M. N. / Grunskii, D. I. / Dostanko, A. P. | British Library Online Contents | 1999

Plasma Enhanced Chemical Vapor Deposition and Characterization of Hydrogenated Amorphous SiC Films on Si

Wang, Y. / Lin, J. / Feng, Z. C. et al. | British Library Online Contents | 2000

Stress relief patterns of hydrogenated amorphous carbon films grown by dc-pulse plasma chemical vapor deposition

Wang, Q. / Wang, C. / Wang, Z. et al. | British Library Online Contents | 2008