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Criteria for the extraction of SIMOX material parameters from spectroscopic ellipsometry data
Criteria for the extraction of SIMOX material parameters from spectroscopic ellipsometry data
Criteria for the extraction of SIMOX material parameters from spectroscopic ellipsometry data
Lynch, S. (author) / Crean, G. M. (author) / Greef, R. (author) / Stoemonos, J. (author)
APPLIED SURFACE SCIENCE ; 63 ; 40
1993-01-01
40 pages
Article (Journal)
Unknown
DDC:
621.35
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