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Spectroscopic ellipsometry on lamellar gratings

Antos, R. / Ohlidal, I. / Mistrik, J. / Murakami, K. / Yamaguchi, T. / Pistora, J. / Horie, M. / Visnovsky, S.

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Spectroscopic ellipsometry on lamellar gratings

Antos, R. / Ohlidal, I. / Mistrik, J. / Murakami, K. / Yamaguchi, T. / Pistora, J. / Horie, M. / Visnovsky, S.

Spectroscopic ellipsometry on lamellar gratings

Antos, R. / Ohlidal, I. / Mistrik, J. / Murakami, K. / Yamaguchi, T. / Pistora, J. / Horie, M. / Visnovsky, S.

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Check availability in my library

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Document information

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Document information

Title:

Spectroscopic ellipsometry on lamellar gratings

Contributors:

Antos, R. (author) / Ohlidal, I. (author) / Mistrik, J. (author) / Murakami, K. (author) / Yamaguchi, T. (author) / Pistora, J. (author) / Horie, M. (author) / Visnovsky, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 244 ; 225-229

Publication date:

2005-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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