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Round robin investigation of silicon oxide on silicon reference materials for ellipsometry

Vanhellemont, J. / Maes, H. E. / Schaekers, M. / Armigliato, A.

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Round robin investigation of silicon oxide on silicon reference materials for ellipsometry

Vanhellemont, J. / Maes, H. E. / Schaekers, M. / Armigliato, A.

Round robin investigation of silicon oxide on silicon reference materials for ellipsometry

Vanhellemont, J. / Maes, H. E. / Schaekers, M. / Armigliato, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Round robin investigation of silicon oxide on silicon reference materials for ellipsometry

Contributors:

Vanhellemont, J. (author) / Maes, H. E. (author) / Schaekers, M. (author) / Armigliato, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 63 ; 45

Publication date:

1993-01-01

Size:

45 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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