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SIMS round-robin study of depth profiling of arsenic implants in silicon

Tomita, M. / Hasegawa, T. / Hashimoto, S. / Hayashi, S. / Homma, Y. / Kakehashi, S. / Kazama, Y. / Koezuka, K. / Kuroki, H. / Kusama, K.

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SIMS round-robin study of depth profiling of arsenic implants in silicon

Tomita, M. / Hasegawa, T. / Hashimoto, S. / Hayashi, S. / Homma, Y. / Kakehashi, S. / Kazama, Y. / Koezuka, K. / Kuroki, H. / Kusama, K.

SIMS round-robin study of depth profiling of arsenic implants in silicon

Tomita, M. / Hasegawa, T. / Hashimoto, S. / Hayashi, S. / Homma, Y. / Kakehashi, S. / Kazama, Y. / Koezuka, K. / Kuroki, H. / Kusama, K.

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Document information

Title:

SIMS round-robin study of depth profiling of arsenic implants in silicon

Contributors:

Tomita, M. (author) / Hasegawa, T. (author) / Hashimoto, S. (author) / Hayashi, S. (author) / Homma, Y. (author) / Kakehashi, S. (author) / Kazama, Y. (author) / Koezuka, K. (author) / Kuroki, H. (author) / Kusama, K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 465-469

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Simons, D. / Kim, K. / Benbalagh, R. et al. | British Library Online Contents | 2006

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Yeo, K. L. / Wee, A. T. / See, A. et al. | British Library Online Contents | 2003

Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test

Toujou, F. / Yoshikawa, S. / Homma, Y. et al. | British Library Online Contents | 2004

Accurate depth profiling for ultra-shallow implants using backside-SIMS

Hongo, C. / Tomita, M. / Takenaka, M. | British Library Online Contents | 2004