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    Infrared analysis of buried insulator layers formed by ion implantation into silicon

    New search for: Samitier, J.
    New search for: Martinez, S.
    New search for: El Hassani, A.
    New search for: Perez-Rodriguez, A.

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    Infrared analysis of buried insulator layers formed by ion implantation into silicon

    New search for: Samitier, J.
    New search for: Martinez, S.
    New search for: El Hassani, A.
    New search for: Perez-Rodriguez, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Infrared analysis of buried insulator layers formed by ion implantation into silicon

    New search for: Samitier, J.
    New search for: Martinez, S.
    New search for: El Hassani, A.
    New search for: Perez-Rodriguez, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Infrared analysis of buried insulator layers formed by ion implantation into silicon

    Contributors:

    Samitier, J. (author) / Martinez, S. (author) / El Hassani, A. (author) / Perez-Rodriguez, A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 63 ; 312

    Publication date:

    1993-01-01

    Size:

    312 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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