Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon: Fid-Bau Portal

Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon

Chen, D. / Wong, S. P. / Ho, L. C. / Yan, H. / Materials Research Society

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon

Chen, D. / Wong, S. P. / Ho, L. C. / Yan, H. / Materials Research Society

Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon

Chen, D. / Wong, S. P. / Ho, L. C. / Yan, H. / Materials Research Society

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon

Contributors:

Chen, D. (author) / Wong, S. P. (author) / Ho, L. C. (author) / Yan, H. (author) / Ma, E. / Materials Research Society

Conference:

Symposium, Phase transformations and systems driven far from equilibrium ; 1997 ; Boston; MA

Published in:

Phase transformations and systems driven far from equilibrium ; 407-412

MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS ; 481

Publication date:

1998-01-01

Size:

6 pages

Remarks:

Held as symposium B of the 1997 MRS Fall meeting

ISBN:

155899386X

ISSN:

0272-9172

Type of media:

Conference paper

Type of material:

Language:

English

Keywords:

phase transformations , equilibrium , materials research , MRS

Wan, Y.Z. / Xiong, G.Y. / Song, F. et al. | British Library Online Contents | 2007

Tribological properties changes of H13 steel induced by MEVVA Ta ion implantation

Jianhua, Y. / Tonghe, Z. | British Library Online Contents | 2004

Formation and characterization of Si5C3 type silicon carbide by carbon ion implantation with a MEVVA ion source

Guo, L. B. / Wang, Y. L. / Song, F. et al. | British Library Online Contents | 2007

High-Quality Semiconductor Carbon-Doped beta-FeSi~2 Film Synthesized by MEVVA Ion Implantation

Li, X. / Dong, C. / Xu, L. | British Library Online Contents | 2005

Infrared analysis of buried insulator layers formed by ion implantation into silicon

Samitier, J. / Martinez, S. / El Hassani, A. et al. | British Library Online Contents | 1993