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Analysis of Buried Nitride Layers Produced by Ion Implantation

Froese, D. / Kollewe, D.

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Analysis of Buried Nitride Layers Produced by Ion Implantation

Froese, D. / Kollewe, D.

Analysis of Buried Nitride Layers Produced by Ion Implantation

Froese, D. / Kollewe, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Analysis of Buried Nitride Layers Produced by Ion Implantation

Contributors:

Froese, D. (author) / Kollewe, D. (author) / Hoffmann, M. J. / Becher, P. F. / Petzow, G.

Published in:

Silicon Nitride 93 ; 749

KEY ENGINEERING MATERIALS

Publication date:

1994-01-01

Size:

749 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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