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Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals

Hara, A. / Aoki, M. / Fukuda, T. / Ohsawa, A.

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Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals

Hara, A. / Aoki, M. / Fukuda, T. / Ohsawa, A.

Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals

Hara, A. / Aoki, M. / Fukuda, T. / Ohsawa, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals

Contributors:

Hara, A. (author) / Aoki, M. (author) / Fukuda, T. (author) / Ohsawa, A. (author) / Taguchi, T.

Published in:

Shallow Impurities in Semiconductors ; 219

MATERIALS SCIENCE FORUM

Publication date:

1993-01-01

Size:

219 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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