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Differential Hall characterisation of ultrashallow doping in advanced Si-based materials
Differential Hall characterisation of ultrashallow doping in advanced Si-based materials
Differential Hall characterisation of ultrashallow doping in advanced Si-based materials
Bennett, N. S. (author) / Cowern, N. E. (author) / Smith, A. J. (author) / Kah, M. (author) / Gwilliam, R. M. (author) / Sealy, B. J. (author) / Noakes, T. C. (author) / Bailey, P. (author) / Giubertoni, D. (author) / Bersani, M. (author)
MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 229-233
2008-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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