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Enhanced formation of oxygen-related thermal donors in Ge crystals exposed to hydrogen plasma
Enhanced formation of oxygen-related thermal donors in Ge crystals exposed to hydrogen plasma
Enhanced formation of oxygen-related thermal donors in Ge crystals exposed to hydrogen plasma
Kazuchits, N. M. (author) / Litvinov, V. V. (author) / Murin, L. I. (author) / Martinovich, V. A. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 625-628
2006-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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