PECVD silicon oxides as studied by XPS, RBS, ERDA, IRS and ESR: Fid-Bau Portal

PECVD silicon oxides as studied by XPS, RBS, ERDA, IRS and ESR

Ermolieff, A. / Sindzingre, T. / Marthon, S. / Martin, P.

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PECVD silicon oxides as studied by XPS, RBS, ERDA, IRS and ESR

Ermolieff, A. / Sindzingre, T. / Marthon, S. / Martin, P.

PECVD silicon oxides as studied by XPS, RBS, ERDA, IRS and ESR

Ermolieff, A. / Sindzingre, T. / Marthon, S. / Martin, P.

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Order at Subito €

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Document information

Title:

PECVD silicon oxides as studied by XPS, RBS, ERDA, IRS and ESR

Contributors:

Ermolieff, A. (author) / Sindzingre, T. (author) / Marthon, S. (author) / Martin, P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 64 ; 175

Publication date:

1993-01-01

Size:

175 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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