RBS-ERDA, XPS and XRD characterizations of PECVD tungsten nitride films: Fid-Bau Portal

RBS-ERDA, XPS and XRD characterizations of PECVD tungsten nitride films

Meunier, C. / Monteil, C. / Savall, C. / Palmino, F. / Weber, J. / Berjoan, R. / Durand, J.

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RBS-ERDA, XPS and XRD characterizations of PECVD tungsten nitride films

Meunier, C. / Monteil, C. / Savall, C. / Palmino, F. / Weber, J. / Berjoan, R. / Durand, J.

RBS-ERDA, XPS and XRD characterizations of PECVD tungsten nitride films

Meunier, C. / Monteil, C. / Savall, C. / Palmino, F. / Weber, J. / Berjoan, R. / Durand, J.

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Title:

RBS-ERDA, XPS and XRD characterizations of PECVD tungsten nitride films

Contributors:

Meunier, C. (author) / Monteil, C. (author) / Savall, C. (author) / Palmino, F. (author) / Weber, J. (author) / Berjoan, R. (author) / Durand, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 125 ; 313-320

Publication date:

1998-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Choi, S. W. / Bachmann, K. J. / Lucovsky, G. | British Library Online Contents | 1993

PECVD silicon oxides as studied by XPS, RBS, ERDA, IRS and ESR

Ermolieff, A. / Sindzingre, T. / Marthon, S. et al. | British Library Online Contents | 1993

28273 - Erda

Forschungszentrum Deutscher Sprachatlas | DataCite | 1876

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Neural network modeling of PECVD silicon nitride films

Ghosh, S. / Dutta, P.K. / Bose, D.N. | British Library Online Contents | 1999

Depth profiling of W, O and H in tungsten trioxide thin films using RBS and ERDA techniques

Bohnke, O. / Frand, G. / Fromm, M. et al. | British Library Online Contents | 1996