Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Chemical vapour deposition precursors for metal silicides

    New search for: Madar, R.
    New search for: Thomas, N.
    New search for: Bernard, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Chemical vapour deposition precursors for metal silicides

    New search for: Madar, R.
    New search for: Thomas, N.
    New search for: Bernard, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical vapour deposition precursors for metal silicides

    New search for: Madar, R.
    New search for: Thomas, N.
    New search for: Bernard, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Chemical vapour deposition precursors for metal silicides

    Contributors:

    Madar, R. (author) / Thomas, N. (author) / Bernard, C. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 17 ; 118

    Publication date:

    1993-01-01

    Size:

    118 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    High-rate deposition of titanium silicides under high gas flow rate by chemical vapour deposition

    Kawai, C. | British Library Online Contents | 1994

    Tungsten deposition by organometallic chemical vapour deposition with organotungsten precursors

    Spee, C. I. M. A. / Verbeek, F. / Kraaijkamp, J. G. et al. | British Library Online Contents | 1993

    Electroless Copper Deposition on Metals and Metal Silicides

    Mak, C. Y. | British Library Online Contents | 1994

    Chemical vapour deposition

    British Library Online Contents | 2009

    The volatile pivalates of Y, Ba and Cu as prespective precursors for metal-organic chemical vapour deposition

    Iljina, E. / Korjeva, A. / Kuzmina, N. et al. | British Library Online Contents | 1993

    Back to top