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Tungsten deposition by organometallic chemical vapour deposition with organotungsten precursors

Spee, C. I. M. A. / Verbeek, F. / Kraaijkamp, J. G. / Linden, J. L.

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Tungsten deposition by organometallic chemical vapour deposition with organotungsten precursors

Spee, C. I. M. A. / Verbeek, F. / Kraaijkamp, J. G. / Linden, J. L.

Tungsten deposition by organometallic chemical vapour deposition with organotungsten precursors

Spee, C. I. M. A. / Verbeek, F. / Kraaijkamp, J. G. / Linden, J. L.

Access

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Check availability in my library

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Document information

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Document information

Title:

Tungsten deposition by organometallic chemical vapour deposition with organotungsten precursors

Contributors:

Spee, C. I. M. A. (author) / Verbeek, F. (author) / Kraaijkamp, J. G. (author) / Linden, J. L. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 17 ; 108

Publication date:

1993-01-01

Size:

108 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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