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Epitaxial nucleation of polycrystalline silicon carbide during chemical vapor deposition
Epitaxial nucleation of polycrystalline silicon carbide during chemical vapor deposition
Epitaxial nucleation of polycrystalline silicon carbide during chemical vapor deposition
Sheldon, B. W. (author) / Besmann, T. M. (author) / More, K. L. (author) / Moss, T. S. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 8 ; 1086
1993-01-01
1086 pages
Article (Journal)
Unknown
DDC:
620.11
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