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Effect of crystallographic orientation of Si substrates on SPE NiSi~2 formation
Effect of crystallographic orientation of Si substrates on SPE NiSi~2 formation
Effect of crystallographic orientation of Si substrates on SPE NiSi~2 formation
Yamauchi, S. (author) / Hirai, M. (author) / Kusaka, M. (author) / Iwami, M. (author)
APPLIED SURFACE SCIENCE ; 70/71 ; 461
1993-01-01
461 pages
Article (Journal)
Unknown
DDC:
621.35
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