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X-ray photoelectron spectroscopy study of NiSi formation on shallow junctions

Jiang, Y. L. / Ru, G. P. / Qu, X. P. / Li, B. Z.

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X-ray photoelectron spectroscopy study of NiSi formation on shallow junctions

Jiang, Y. L. / Ru, G. P. / Qu, X. P. / Li, B. Z.

X-ray photoelectron spectroscopy study of NiSi formation on shallow junctions

Jiang, Y. L. / Ru, G. P. / Qu, X. P. / Li, B. Z.

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Check availability in my library

Order at Subito €

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Document information

Title:

X-ray photoelectron spectroscopy study of NiSi formation on shallow junctions

Contributors:

Jiang, Y. L. (author) / Ru, G. P. (author) / Qu, X. P. (author) / Li, B. Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 698-701

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Nakamura, T. / Shimada, H. / Satoh, M. | British Library Online Contents | 2000

Ion-implantation issues in the formation of shallow junctions in germanium

Simoen, E. / Satta, A. / D'Amore, A. et al. | British Library Online Contents | 2006

Epitaxial growth of NiSi~2 induced by sulfur segregation at the NiSi~2/Si(100) interface

Zhao, Q.T. / Mi, S.B. / Jia, C.L. et al. | British Library Online Contents | 2009

Effect of crystallographic orientation of Si substrates on SPE NiSi~2 formation

Yamauchi, S. / Hirai, M. / Kusaka, M. et al. | British Library Online Contents | 1993

Effect of crystallographic orientation of Si substrates on SPE NiSi~2 formation

Yamauchi, S. / Hirai, M. / Kusaka, M. et al. | British Library Online Contents | 1993