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Microstructure and growth of SiC film by excimer laser chemical vapour deposition at low temperatures

Noda, T. / Suzuki, H. / Araki, H. / Abe, F.

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Microstructure and growth of SiC film by excimer laser chemical vapour deposition at low temperatures

Noda, T. / Suzuki, H. / Araki, H. / Abe, F.

Microstructure and growth of SiC film by excimer laser chemical vapour deposition at low temperatures

Noda, T. / Suzuki, H. / Araki, H. / Abe, F.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Microstructure and growth of SiC film by excimer laser chemical vapour deposition at low temperatures

Contributors:

Noda, T. (author) / Suzuki, H. (author) / Araki, H. (author) / Abe, F. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 28 ; 2763

Publication date:

1993-01-01

Size:

2763 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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