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Microstructure of SiC thin films produced on graphite by excimer-laser chemical vapour deposition
Microstructure of SiC thin films produced on graphite by excimer-laser chemical vapour deposition
Microstructure of SiC thin films produced on graphite by excimer-laser chemical vapour deposition
Suzuki, H. (author) / Araki, H. (author) / Noda, T. (author)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 13 ; 49
1994-01-01
49 pages
Article (Journal)
Unknown
DDC:
620.11
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