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Synthesis of -SiC thin films for high temperature sensors by the activated reactive evaporation process

Cha, Y. H. C. / Jou, S. / Prakash, S. / Doerr, H. J.

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Synthesis of -SiC thin films for high temperature sensors by the activated reactive evaporation process

Cha, Y. H. C. / Jou, S. / Prakash, S. / Doerr, H. J.

Synthesis of -SiC thin films for high temperature sensors by the activated reactive evaporation process

Cha, Y. H. C. / Jou, S. / Prakash, S. / Doerr, H. J.

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Order at Subito €

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Document information

Title:

Synthesis of -SiC thin films for high temperature sensors by the activated reactive evaporation process

Contributors:

Cha, Y. H. C. (author) / Jou, S. (author) / Prakash, S. (author) / Doerr, H. J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 163 ; 207

Publication date:

1993-01-01

Size:

207 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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