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Synthesis of -SiC thin films for high temperature sensors by the activated reactive evaporation process
Synthesis of -SiC thin films for high temperature sensors by the activated reactive evaporation process
Synthesis of -SiC thin films for high temperature sensors by the activated reactive evaporation process
Cha, Y. H. C. (author) / Jou, S. (author) / Prakash, S. (author) / Doerr, H. J. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 163 ; 207
1993-01-01
207 pages
Article (Journal)
Unknown
DDC:
620.11
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