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Synthesis of -SiC thin films for high temperature sensors by the activated reactive evaporation process

Cha, Y. H. C. / Jou, S. / Prakash, S. / Doerr, H. J.

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Synthesis of -SiC thin films for high temperature sensors by the activated reactive evaporation process

Cha, Y. H. C. / Jou, S. / Prakash, S. / Doerr, H. J.

Synthesis of -SiC thin films for high temperature sensors by the activated reactive evaporation process

Cha, Y. H. C. / Jou, S. / Prakash, S. / Doerr, H. J.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

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Ähnliche Titel

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Titel:

Synthesis of -SiC thin films for high temperature sensors by the activated reactive evaporation process

Beteiligte:

Cha, Y. H. C. (Autor:in) / Jou, S. (Autor:in) / Prakash, S. (Autor:in) / Doerr, H. J. (Autor:in)

Erschienen in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 163 ; 207

Erscheinungsdatum:

01.01.1993

Format / Umfang:

207 pages

ISSN:

0921-5093

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Unbekannt

Klassifikation:

DDC: 620.11

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