Deposition of indium nitride films by activated reactive evaporation process

Deposition of indium nitride films by activated reactive evaporation process - a feasibility study

Patil, S. J. / Bodas, D. S. / Mandale, A. B. / Gangal, S. A.

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Deposition of indium nitride films by activated reactive evaporation process - a feasibility study

Patil, S. J. / Bodas, D. S. / Mandale, A. B. / Gangal, S. A.

Deposition of indium nitride films by activated reactive evaporation process - a feasibility study

Patil, S. J. / Bodas, D. S. / Mandale, A. B. / Gangal, S. A.

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Document information

Title:

Deposition of indium nitride films by activated reactive evaporation process - a feasibility study

Contributors:

Patil, S. J. (author) / Bodas, D. S. (author) / Mandale, A. B. (author) / Gangal, S. A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 245 ; 73-78

Publication date:

2005-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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