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Grazing-incidence X-ray characterization of amorphous SiO~xN~yH~z thin films

Brunel, M. / Ortega, L. / Cros, Y. / Viscaino, S.

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Grazing-incidence X-ray characterization of amorphous SiO~xN~yH~z thin films

Brunel, M. / Ortega, L. / Cros, Y. / Viscaino, S.

Grazing-incidence X-ray characterization of amorphous SiO~xN~yH~z thin films

Brunel, M. / Ortega, L. / Cros, Y. / Viscaino, S.

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Document information

Title:

Grazing-incidence X-ray characterization of amorphous SiO~xN~yH~z thin films

Contributors:

Brunel, M. (author) / Ortega, L. (author) / Cros, Y. (author) / Viscaino, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 65//66 ; 289

Publication date:

1993-01-01

Size:

289 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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