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Stress in evaporated films used in GaAs processing

Strifler, W. A. / Bates, C. W.

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Stress in evaporated films used in GaAs processing

Strifler, W. A. / Bates, C. W.

Stress in evaporated films used in GaAs processing

Strifler, W. A. / Bates, C. W.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Stress in evaporated films used in GaAs processing

Contributors:

Strifler, W. A. (author) / Bates, C. W. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 6 ; 548

Publication date:

1991-01-01

Size:

548 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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