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    Characterisation of TiN coatings and of the TiN/Si interface by X-ray photoelectron spectroscopy and Auger electron spectroscopy

    New search for: Jouan, P.-Y.
    New search for: Peignon, M.-C.
    New search for: Cardinaud, C.
    New search for: Lemperiere, G.

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    Characterisation of TiN coatings and of the TiN/Si interface by X-ray photoelectron spectroscopy and Auger electron spectroscopy

    New search for: Jouan, P.-Y.
    New search for: Peignon, M.-C.
    New search for: Cardinaud, C.
    New search for: Lemperiere, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterisation of TiN coatings and of the TiN/Si interface by X-ray photoelectron spectroscopy and Auger electron spectroscopy

    New search for: Jouan, P.-Y.
    New search for: Peignon, M.-C.
    New search for: Cardinaud, C.
    New search for: Lemperiere, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Characterisation of TiN coatings and of the TiN/Si interface by X-ray photoelectron spectroscopy and Auger electron spectroscopy

    Contributors:

    Jouan, P.-Y. (author) / Peignon, M.-C. (author) / Cardinaud, C. (author) / Lemperiere, G. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 68 ; 595

    Publication date:

    1993-01-01

    Size:

    595 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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