Morphology and structure of tantalum oxide deposit prepared by KrF excimer laser CVD: Fid-Bau Portal

Morphology and structure of tantalum oxide deposit prepared by KrF excimer laser CVD

Watanabe, A. / Mukaida, M. / Imai, Y. / Osato, K.

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Morphology and structure of tantalum oxide deposit prepared by KrF excimer laser CVD

Watanabe, A. / Mukaida, M. / Imai, Y. / Osato, K.

Morphology and structure of tantalum oxide deposit prepared by KrF excimer laser CVD

Watanabe, A. / Mukaida, M. / Imai, Y. / Osato, K.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Morphology and structure of tantalum oxide deposit prepared by KrF excimer laser CVD

Contributors:

Watanabe, A. (author) / Mukaida, M. (author) / Imai, Y. (author) / Osato, K. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 28 ; 5363

Publication date:

1993-01-01

Size:

5363 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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