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Morphology and structure of tantalum oxide deposit prepared by KrF excimer laser CVD
Morphology and structure of tantalum oxide deposit prepared by KrF excimer laser CVD
Morphology and structure of tantalum oxide deposit prepared by KrF excimer laser CVD
Watanabe, A. (Autor:in) / Mukaida, M. (Autor:in) / Imai, Y. (Autor:in) / Osato, K. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 28 ; 5363
01.01.1993
5363 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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