Problems in the deconvolution of SIMS depth profiles using delta-doped test structures

Zalm, P. C. / De Kruif, R. C. M. | British Library Online Contents | 1993

Deconvolution of very low primary energy SIMS depth profiles

Fares, B. / Gautier, B. / Dupuy, J. C. et al. | British Library Online Contents | 2006

Deconvolution of SIMS depth profiles: Towards simple and faster techniques

Boulsina, F. / Berrabah, M. / Dupuy, J. C. | British Library Online Contents | 2008

SIMS study of depth profiles of delta-doped boron/silicon alternating layers by low-energy ion beams

Hayashi, S. / Takano, A. / Takenaka, H. et al. | British Library Online Contents | 2003

Evaluation of SIMS depth resolution using delta-doped multilayers and mixing-roughness-information depth model

Takano, A. / Homma, Y. / Higashi, Y. et al. | British Library Online Contents | 2003