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Evaluation of SIMS depth resolution using delta-doped multilayers and mixing-roughness-information depth model
Evaluation of SIMS depth resolution using delta-doped multilayers and mixing-roughness-information depth model
Evaluation of SIMS depth resolution using delta-doped multilayers and mixing-roughness-information depth model
Takano, A. (author) / Homma, Y. (author) / Higashi, Y. (author) / Takenaka, H. (author) / Hayashi, S. (author) / Goto, K. (author) / Inoue, M. (author) / Shimizu, R. (author)
APPLIED SURFACE SCIENCE ; 203-204 ; 294-297
2003-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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