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    Ti-silicide with improved thermal stability using silicidation through oxide on amorphous Si substrates

    New search for: Hwang, Y. S.
    New search for: Paek, S. H.
    New search for: Kang, S. G.
    New search for: Cho, H. C.

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    Ti-silicide with improved thermal stability using silicidation through oxide on amorphous Si substrates

    New search for: Hwang, Y. S.
    New search for: Paek, S. H.
    New search for: Kang, S. G.
    New search for: Cho, H. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ti-silicide with improved thermal stability using silicidation through oxide on amorphous Si substrates

    New search for: Hwang, Y. S.
    New search for: Paek, S. H.
    New search for: Kang, S. G.
    New search for: Cho, H. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Ti-silicide with improved thermal stability using silicidation through oxide on amorphous Si substrates

    Contributors:

    Hwang, Y. S. (author) / Paek, S. H. (author) / Kang, S. G. (author) / Cho, H. C. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE LETTERS ; 12 ; 1726

    Publication date:

    1993-01-01

    Size:

    1726 pages

    ISSN:

    0261-8028

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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