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Improved thermal stability of cobalt silicide formed by ion beam assisted deposition on polysilicon

Ravesi, S. / La Via, F. / Raineri, V. / Spinella, C.

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Improved thermal stability of cobalt silicide formed by ion beam assisted deposition on polysilicon

Ravesi, S. / La Via, F. / Raineri, V. / Spinella, C.

Improved thermal stability of cobalt silicide formed by ion beam assisted deposition on polysilicon

Ravesi, S. / La Via, F. / Raineri, V. / Spinella, C.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Improved thermal stability of cobalt silicide formed by ion beam assisted deposition on polysilicon

Contributors:

Ravesi, S. (author) / La Via, F. (author) / Raineri, V. (author) / Spinella, C. (author) / Gessner, T. / Schulz, S. E.

Published in:

Materials for Advanced Metallization ; 19-23

APPLIED SURFACE SCIENCE ; 91

Publication date:

1996-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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