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Formation of silicide thin films by solid state reaction

Gas, P. / D'Heurle, F. M.

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Formation of silicide thin films by solid state reaction

Gas, P. / D'Heurle, F. M.

Formation of silicide thin films by solid state reaction

Gas, P. / D'Heurle, F. M.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Formation of silicide thin films by solid state reaction

Contributors:

Gas, P. (author) / D'Heurle, F. M. (author) / Janssen, G. C. A. M. / Jongste, J. F. / Radelaar, S.

Published in:

Proceedings of the Fifth European Workshop on Refractory Metals and Silicides ; 153

APPLIED SURFACE SCIENCE ; 72

Publication date:

1993-01-01

Size:

153 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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