Silicide formation by solid-state diffusion in MO/Si multilayer thin films: Fid-Bau Portal

Silicide formation by solid-state diffusion in MO/Si multilayer thin films

Chi, E. / Shim, J. / Kwak, J. / Balk, H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Silicide formation by solid-state diffusion in MO/Si multilayer thin films

Chi, E. / Shim, J. / Kwak, J. / Balk, H.

Silicide formation by solid-state diffusion in MO/Si multilayer thin films

Chi, E. / Shim, J. / Kwak, J. / Balk, H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Silicide formation by solid-state diffusion in MO/Si multilayer thin films

Contributors:

Chi, E. (author) / Shim, J. (author) / Kwak, J. (author) / Balk, H. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 31 ; 3567-3572

Publication date:

1996-01-01

Size:

6 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Gas, P. / D'Heurle, F. M. | British Library Online Contents | 1993

Growth of amorphous silicide during Ti/Si interfacial reactions in multilayer thin films

Ma, E. | British Library Online Contents | 2005

Preparation of manganese silicide thin films by solid phase reaction

Wang, J. / Hirai, M. / Kusaka, M. et al. | British Library Online Contents | 1997

Silicide formation during reaction between Ni ultra-thin films and Si(001) substrates

Fouet, J. / Texier, M. / Richard, M. I. et al. | British Library Online Contents | 2014

Ellipsometric Studies of Polycrystalline Molybdenum Silicide Thin Films

Srinivas, G. / Vankar, V. D. | British Library Online Contents | 1996