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Excess vacancy generation in silicon during surface silicide formation

Italyantsev, A. G. / Kuznetsov, A. Y.

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Excess vacancy generation in silicon during surface silicide formation

Italyantsev, A. G. / Kuznetsov, A. Y.

Excess vacancy generation in silicon during surface silicide formation

Italyantsev, A. G. / Kuznetsov, A. Y.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Excess vacancy generation in silicon during surface silicide formation

Contributors:

Italyantsev, A. G. (author) / Kuznetsov, A. Y. (author) / Janssen, G. C. A. M. / Jongste, J. F. / Radelaar, S.

Published in:

Proceedings of the Fifth European Workshop on Refractory Metals and Silicides ; 203

APPLIED SURFACE SCIENCE ; 72

Publication date:

1993-01-01

Size:

203 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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