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Thin nickel silicide layer formation on silicon on insulator material

Alberti, A. / Cafra, B. / Bongiorno, C. / Mannino, G. / Privitera, V. / Kammler, T. / Feudel, T.

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Thin nickel silicide layer formation on silicon on insulator material

Alberti, A. / Cafra, B. / Bongiorno, C. / Mannino, G. / Privitera, V. / Kammler, T. / Feudel, T.

Thin nickel silicide layer formation on silicon on insulator material

Alberti, A. / Cafra, B. / Bongiorno, C. / Mannino, G. / Privitera, V. / Kammler, T. / Feudel, T.

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Check availability in my library

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Document information

Title:

Thin nickel silicide layer formation on silicon on insulator material

Contributors:

Alberti, A. (author) / Cafra, B. (author) / Bongiorno, C. (author) / Mannino, G. (author) / Privitera, V. (author) / Kammler, T. (author) / Feudel, T. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 42-45

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Cafra, B. / Alberti, A. / Ottaviano, L. et al. | British Library Online Contents | 2004

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Effect of pre-treatment and nickel layer thickness on nickel silicide/silicon carbide contact

Cao, Y. / Nyborg, L. / Jelvestam, U. et al. | British Library Online Contents | 2005

Optimizing the formation of nickel silicide

Foggiato, J. / Yoo, W. S. / Ouaknine, M. et al. | British Library Online Contents | 2004

Tailoring of nickel silicide contacts on silicon carbide

Perez-Garcia, S. A. / Nyborg, L. | British Library Online Contents | 2007