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The influence of silicon substrate crystallinity and doping on TiSi~2 thin film morphology

Karlin, T. E. / Nygren, S. / Mattsson, L. / Andre, E.

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The influence of silicon substrate crystallinity and doping on TiSi~2 thin film morphology

Karlin, T. E. / Nygren, S. / Mattsson, L. / Andre, E.

The influence of silicon substrate crystallinity and doping on TiSi~2 thin film morphology

Karlin, T. E. / Nygren, S. / Mattsson, L. / Andre, E.

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Order at Subito €

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Document information

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Document information

Title:

The influence of silicon substrate crystallinity and doping on TiSi~2 thin film morphology

Contributors:

Karlin, T. E. (author) / Nygren, S. (author) / Mattsson, L. (author) / Andre, E. (author) / Janssen, G. C. A. M. / Jongste, J. F. / Radelaar, S.

Published in:

Proceedings of the Fifth European Workshop on Refractory Metals and Silicides ; 280

APPLIED SURFACE SCIENCE ; 72

Publication date:

1993-01-01

Size:

280 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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