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    Depth Profiling of Thin TiSi~x-Films on Silicon Carbide by SNMS

    New search for: Getto, R.
    New search for: Freytag, J.
    New search for: Kopnarski, M.
    New search for: Oechsner, H.

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    Depth Profiling of Thin TiSi~x-Films on Silicon Carbide by SNMS

    New search for: Getto, R.
    New search for: Freytag, J.
    New search for: Kopnarski, M.
    New search for: Oechsner, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Depth Profiling of Thin TiSi~x-Films on Silicon Carbide by SNMS

    New search for: Getto, R.
    New search for: Freytag, J.
    New search for: Kopnarski, M.
    New search for: Oechsner, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Depth Profiling of Thin TiSi~x-Films on Silicon Carbide by SNMS

    Contributors:

    Getto, R. (author) / Freytag, J. (author) / Kopnarski, M. (author) / Oechsner, H. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 287/288 ; 231-234

    Publication date:

    1998-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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